
Mechanical Engineer Substrate Handling
Lam Research AGKI-Zusammenfassung
The group you'll be a part of
In the Global Products Group, we are dedicated to excellence in the design and engineering of Lam's wet chemistry process equipment for panel-level packaging. We develop substrate holder (chucks/frames) and handling solutions that enable high-yield, high-throughput processing of large-format substrates across advanced semiconductor applications.
The impact you'll make
As a Mechanical Engineer specializing in substrate holder design and panel handling, you will define and develop critical core hardware for wet chemistry processing tools. Your work will directly influence process performance, yield, and reliability by ensuring safe, repeatable, and contamination-controlled handling of substrates throughout the process flow. You will play a key role in advancing chuck concepts, sealing technologies, and handling interfaces, driving improvements in throughput, defectivity, robustness, and cost efficiency.
What you'll do
Substrate holder (Chuck) design
- Design and develop substrate holders (chucks) for wet chemistry processes, including plating, cleaning, and etching applications
- Define sealing concepts, panel support strategies, clamping mechanisms, and chemical exposure interfaces
- Optimize designs for uniform process conditions, minimal particle generation, and high substrate integrity (e.g. low breakage, controlled deformation)
Panel and substrate handling
- Design mechanical interfaces between substrate holders and tool automation (transfer systems, process chambers)
- Develop concepts for loading/unloading, alignment, gripping, and secure transport of panels
- Ensure safe interaction between handling systems and substrate holders to avoid damage and contamination
- Collaborate with multiple teams, e.g. automation teams on end effector and handling strategy development, and process teams on optimising process performance
Engineering development & validation
- Own full product lifecycle from concept through productization for chuck assemblies
- Perform detailed mechanical design including tolerance stack-ups, sealing interfaces, and alignment concepts
- Conduct analysis including structural, FEA, thermal effects, deformation, and vibration
- Develop and execute validation plans focusing on chemical compatibility, lifetime and wear, process robustness
- Drive root cause analysis and design improvements for field issues
- Build and support testing of prototypes in lab and tool environments
- Execute test plans to evaluate performance such as sealing, leakage, and handling robustness
- Document results and support analysis of issues and design improvements
Materials & process environment
- Select and qualify materials such as polymers, elastomers, ceramics, metals, and coatings for harsh wet chemistry environments
- Ensure compatibility with plating chemistries, acids, solvents, and DI water processes
- Design for cleanability, maintainability, and minimal chemical retention
Manufacturing & productization
- Collaborate with suppliers and manufacturing to ensure high-quality, cost-effective, and scalable designs
- Drive DFM/DFA improvements for complex assemblies
- Define and release complete documentation including drawings, specifications, and assembly concepts
- Perform technical design reviews and work in cross-functional project teams
- Drive standardization of substrate holder platforms and modular design concepts
Who we're looking for
Minimum qualifications
- Bachelor's or Master's degree in Mechanical Engineering or related field
- 3-5 years of experience in mechanical design or product development
- Strong experience in precision mechanical design, ideally in complex equipment or capital systems
- Proficiency in 3D CAD tools (Siemens NX, SolidEdge, or similar)
- Solid foundation in GD&T, tolerance analysis, and assembly design
- Hands-on experience in testing, debugging, and validating mechanical systems
Preferred qualifications
- Exposure to semiconductor equipment, wet processing, or plating systems
- Experience with substrate holders, chucks, or wafer/panel handling systems
- Strong understanding of sealing technologies, chemical compatibility, precision alignment
- Experience working with automation systems
What we're offering
This position is subject to the Austrian Collective Bargaining Agreement (CBA) for Employees in the Metal Technology Industry in occupation group F, depending on your educational background. A higher payment is negotiable depending on expertise and skills.
Our commitment
We believe it is important for every person to feel valued, included, and empowered to achieve their full potential. Lam Research is an equal opportunity employer.
Lam offers a variety of work location models based on the needs of each role. Our hybrid roles combine the benefits of on-site collaboration with colleagues and the flexibility to work remotely.
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